成都西沃克真空科技有限公司

红外增透镀膜机

日期:2017-11-20 / 人气: / 来源:CVAC

※ 用途 Usage:

 ◆ 主要用于蒸镀红外膜。
 ›  Mainly used for evaporation of infrared film.

※ 创新特点 Innovative features:

 ◆ 六位阻蒸(四项国内发明):防震旋转式六位阻蒸台,可放置六个靶材,实现基片的连续镀膜。
 ◆ 十二位晶振探头。
 ›  Six-resistant steam (Four domestic patents): shock proof rotary type six position
vapor suppression table, six target material can be placed to realize continuous
coating of substrate.
 ›  Twelve crystal probe
 
※ 设备特点 Features:
 
 ◆ 全自动化控制系统,实现全自动化无值守操作;
 ◆ 箱式,立式前开门,蒸发室和抽气室为整体焊接式;
 ◆ 电子束蒸发源及电阻蒸发源蒸发速率控制及蒸发源挡板联动;
 ◆ 真空室内腔尺寸:Φ1100mmXΦ1000mm;
 ◆ 极限真空度:≤3×10 Pa(12小时)(12 hours);
 ›  Fully automated control system, to achieve full automation unattended operation;
 ›  Box type, vertical front door, evaporation chamber and exhaust chamber for integral
welding type;
 ›  Electron beam evaporation source and resistance evaporation source, evaporation
rate control and evaporation source baffle linkage;
 ›  Vacuum chamber cavity size:Φ1100mmXΦ1000mm;
 ›  Ultimate vacuum:≤3×10-4Pa(12 hours);

作者:CVAC


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